IP Library › Granted Patent US 5,514,936
Granted Patent Utility
US 5,514,936 · App. 08/383,350

RF plasma source and method for plasma cleaning of surface in space

Inventors: Weldon S. Williamson, Barret Lippey, John D. Williams
Patented Case View Patent ↗
Granted: May 7, 1996 Filed: Feb 3, 1995
Inventors
Weldon S. Williamson
Barret Lippey
John D. Williams
Assignee (at issue)
Hughes Aircraft Company

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Quick Facts
Patent No.
US 5,514,936
App. No.
08/383,350
Filed
1995-02-03
Granted
1996-05-07
Kind
A