Granted Patent
Utility
US 5,518,572 · App. 08/444,261
Plasma processing system and method
Inventors:
Osamu Kinoshita, Shigemi Murakawa, Naoki Kubota
Patented Case
View Patent ↗
Granted: May 21, 1996
Filed: May 18, 1995
Inventors
Osamu Kinoshita
Shigemi Murakawa
Naoki Kubota
Assignee (at issue)
Kawasaki Steel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.