Granted Patent
Utility
US 5,521,424 · App. 08/361,536
Semiconductor device having a silicon oxide film containing fluorine atoms
Inventors:
Kazuyoshi Ueno, Tetsuya Homma
Patented Case
View Patent ↗
Granted: May 28, 1996
Filed: Dec 22, 1994
Inventors
Kazuyoshi Ueno
Tetsuya Homma
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.