Granted Patent
Utility
US 5,521,790 · App. 08/241,527
Electrostatic chuck having relatively thick and thin areas and means for uniformly cooling said thick and thin areas during chuck anodization
Inventors:
Raymond R. Ruckel, Robert E. Tompkins, Robert P. Westerfield, Jr.
Patented Case
View Patent ↗
Granted: May 28, 1996
Filed: May 12, 1994
Inventors
Raymond R. Ruckel
Robert E. Tompkins
Robert P. Westerfield, Jr.
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.