Granted Patent
Utility
US 5,525,806 · App. 08/191,863
Focused charged beam apparatus, and its processing and observation method
Inventors:
Koji Iwasaki, Tatsuya Adachi, Yutaka Ikku, Takashi Kaito
Patented Case
View Patent ↗
Granted: Jun 11, 1996
Filed: Feb 4, 1994
Inventors
Koji Iwasaki
Tatsuya Adachi
Yutaka Ikku
Takashi Kaito
Assignee (at issue)
SEIKO INSTRUMENTS INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.