Granted Patent
Utility
US 5,532,191 · App. 08/216,410
Method of chemical mechanical polishing planarization of an insulating film using an etching stop
Inventors:
Tadashi Nakano, Nobuyoshi Sato, Tomohiro Ohta, Hiroshi Yamamoto
Patented Case
View Patent ↗
Granted: Jul 2, 1996
Filed: Mar 23, 1994
Inventors
Tadashi Nakano
Nobuyoshi Sato
Tomohiro Ohta
Hiroshi Yamamoto
Assignee (at issue)
Kawasaki Steel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.