Granted Patent
Utility
US 5,539,992 · App. 08/421,707
Fixture for alignment of vacuum nozzles on semiconductor manufacturing equipment
Inventor:
Glenn Woodhouse
Patented Case
View Patent ↗
Granted: Jul 30, 1996
Filed: Apr 12, 1995
Inventor
Glenn Woodhouse
Assignee (at issue)
MICRON ELECTRONICS LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.