IP Library › Granted Patent US 5,539,998
Granted Patent Utility
US 5,539,998 · App. 08/303,986

High purity bulk chemical delivery system

Inventors: Lewis J. Mostowy, Jr., Naser Mahmud Chowdhury
Patented Case View Patent ↗
Granted: Jul 30, 1996 Filed: Sep 9, 1994
Inventors
Lewis J. Mostowy, Jr.
Naser Mahmud Chowdhury
Assignee (at issue)
Air Products and Chemicals, Inc.

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Quick Facts
Patent No.
US 5,539,998
App. No.
08/303,986
Filed
1994-09-09
Granted
1996-07-30
Kind
A