Granted Patent
Utility
US 5,541,033 · App. 08/384,501
Selected o-quinonediazide sulfonic acid esters of phenolic compounds and their use in radiation-sensitive compositions
Inventors:
Andrew J. Blakeney, Arturo Norberto Medina, Medhat A. Toukhy, Lawrence Ferreira, Sobhy Tadros
Patented Case
View Patent ↗
Granted: Jul 30, 1996
Filed: Feb 1, 1995
Inventors
Andrew J. Blakeney
Arturo Norberto Medina
Medhat A. Toukhy
Lawrence Ferreira
Sobhy Tadros
Assignee (at issue)
OCG Microelectronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.