Granted Patent
Utility
US 5,547,093 · App. 08/305,540
Method for forming a micromachine motion sensor
Inventor:
Douglas Ray Sparks
Patented Case
View Patent ↗
Granted: Aug 20, 1996
Filed: Sep 14, 1994
Inventor
Douglas Ray Sparks
Assignee (at issue)
DELCO ELECTRONICS CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.