Granted Patent
Utility
US 5,552,181 · App. 08/170,789
Method for supplying liquid material and process for forming thin films using the liquid material supplying method
Inventors:
Eiichi Kondoh, Toru Mitomo, Hiroshi Yamamoto, Tomohiro Ohta
Patented Case
View Patent ↗
Granted: Sep 3, 1996
Filed: Dec 21, 1993
Inventors
Eiichi Kondoh
Toru Mitomo
Hiroshi Yamamoto
Tomohiro Ohta
Assignee (at issue)
Kawasaki Steel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.