IP Library › Granted Patent US 5,557,105
Granted Patent Utility
US 5,557,105 · App. 08/320,377

Pattern inspection apparatus and electron beam apparatus

Inventors: Ichiro Honjo, Kenji Sugishima, Masaki Yamabe
Patented Case View Patent ↗
Granted: Sep 17, 1996 Filed: Oct 11, 1994
Inventors
Ichiro Honjo
Kenji Sugishima
Masaki Yamabe
Assignee (at issue)
Fujitsu Limited

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Quick Facts
Patent No.
US 5,557,105
App. No.
08/320,377
Filed
1994-10-11
Granted
1996-09-17
Kind
A