Granted Patent
Utility
US 5,557,972 · App. 08/305,059
Miniature silicon based thermal vacuum sensor and method of measuring vacuum pressures
Inventors:
David Jacobs, William J. Alvesteffer
Patented Case
View Patent ↗
Granted: Sep 24, 1996
Filed: Sep 13, 1994
Inventors
David Jacobs
William J. Alvesteffer
Assignee (at issue)
Teledyne Industries, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.