Granted Patent
Utility
US 5,563,090 · App. 08/419,264
Method for forming rugged tungsten film and method for fabricating semiconductor device utilizing the same
Inventors:
Young Jong Lee, Bok Won Cho
Patented Case
View Patent ↗
Granted: Oct 8, 1996
Filed: Apr 10, 1995
Inventors
Young Jong Lee
Bok Won Cho
Assignee (at issue)
LG Semicon Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.