IP Library Granted Patent US 5,571,393
Granted Patent Utility
US 5,571,393 · App. 08/295,324

Magnet housing for a sputtering cathode

Inventors: Clifford L. Taylor, Daniel Theodore Crowley
Patented Case View Patent ↗
Granted: Nov 5, 1996 Filed: Aug 24, 1994
Inventors
Clifford L. Taylor
Daniel Theodore Crowley
Assignee (at issue)
Viratec Thin Films, Inc.

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Quick Facts
Patent No.
US 5,571,393
App. No.
08/295,324
Filed
1994-08-24
Granted
1996-11-05
Kind
A