Granted Patent
Utility
US 5,588,831 · App. 08/492,446
Furnace system equipped with protected combustion nozzle used in fabrication of semiconductor device
Inventor:
Satoru OKUYAMA
Patented Case
View Patent ↗
Granted: Dec 31, 1996
Filed: Jun 19, 1995
Inventor
Satoru OKUYAMA
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.