Granted Patent
Utility
US 5,591,264 · App. 08/405,133
Spin coating device
Inventors:
Emi Sugimoto, Akira Yoshio, Yoshinori Ito
Patented Case
View Patent ↗
Granted: Jan 7, 1997
Filed: Mar 16, 1995
Inventors
Emi Sugimoto
Akira Yoshio
Yoshinori Ito
Assignee (at issue)
SONY GROUP CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.