IP Library Granted Patent US 5,591,314
Granted Patent Utility
US 5,591,314 · App. 08/549,246

Apparatus for affixing a rotating cylindrical magnetron target to a spindle

Inventors: Steven V. Morgan, Johan Vanderstraeten, Erwin Vanderstraeten, Guy Gobin
Patented Case View Patent ↗
Granted: Jan 7, 1997 Filed: Oct 27, 1995
Inventors
Steven V. Morgan
Johan Vanderstraeten
Erwin Vanderstraeten
Guy Gobin

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Quick Facts
Patent No.
US 5,591,314
App. No.
08/549,246
Filed
1995-10-27
Granted
1997-01-07
Kind
A