Granted Patent
Utility
US 5,593,505 · App. 08/424,904
Method for cleaning semiconductor wafers with sonic energy and passing through a gas-liquid-interface
Inventors:
Henry F. Erk, Ronald D. Bartram, Eugene R. Hollander, Jing Chai
Patented Case
View Patent ↗
Granted: Jan 14, 1997
Filed: Apr 19, 1995
Inventors
Henry F. Erk
Ronald D. Bartram
Eugene R. Hollander
Jing Chai
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.