Granted Patent
Utility
US 5,597,957 · App. 08/361,430
Microvacuum sensor having an expanded sensitivity range
Inventors:
Joerg Schieferdecker, Friedemann Voelklein
Patented Case
View Patent ↗
Granted: Jan 28, 1997
Filed: Dec 21, 1994
Inventors
Joerg Schieferdecker
Friedemann Voelklein
Assignee (at issue)
Heimann Optoelectronics GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.