Granted Patent
Utility
US 5,605,867 · App. 08/034,748
Method of manufacturing insulating film of semiconductor device and apparatus for carrying out the same
Inventors:
Nobuyoshi Sato, Tomohiro Ohta, Tadashi Nakano, Hiroshi Yamamoto
Patented Case
View Patent ↗
Granted: Feb 25, 1997
Filed: Mar 15, 1993
Inventors
Nobuyoshi Sato
Tomohiro Ohta
Tadashi Nakano
Hiroshi Yamamoto
Assignee (at issue)
Kawasaki Steel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.