Granted Patent
Utility
US 5,610,716 · App. 08/520,029
Method and apparatus for measuring film thickness utilizing the slope of the phase of the Fourier transform of an autocorrelator signal
Inventors:
Wayne V. Sorin, Brian L. Heffner, Shalini Venkatesh
Patented Case
View Patent ↗
Granted: Mar 11, 1997
Filed: Aug 28, 1995
Inventors
Wayne V. Sorin
Brian L. Heffner
Shalini Venkatesh
Assignee (at issue)
Hewlett-Packard Company, L.P.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.