Granted Patent
Utility
US 5,616,224 · App. 08/437,816
Apparatus for reducing the intensity and frequency of arcs which occur during a sputtering process
Inventor:
Norman L. Boling
Patented Case
View Patent ↗
Granted: Apr 1, 1997
Filed: May 9, 1995
Inventor
Norman L. Boling
Assignee (at issue)
Deposition Sciences, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.