Granted Patent
Utility
US 5,619,304 · App. 08/346,522
Reduction exposure apparatus with improved resolution characteristic and raised light intensity
Inventor:
Tadao Yasuzato
Patented Case
View Patent ↗
Granted: Apr 8, 1997
Filed: Nov 29, 1994
Inventor
Tadao Yasuzato
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.