Granted Patent
Utility
US 5,620,577 · App. 08/590,811
Spring-loaded mount for a rotatable sputtering cathode
Inventor:
Clifford L. Taylor
Patented Case
View Patent ↗
Granted: Apr 15, 1997
Filed: Jan 24, 1996
Inventor
Clifford L. Taylor
Assignee (at issue)
Viratec Thin Films, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.