Granted Patent
Utility
US 5,620,930 · App. 08/425,734
Trench etching in an integrated-circuit semiconductor device
Inventors:
Hans P. W. Hey, Kei Yoshida
Patented Case
View Patent ↗
Granted: Apr 15, 1997
Filed: Apr 20, 1995
Inventors
Hans P. W. Hey
Kei Yoshida
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.