Granted Patent
Utility
US 5,622,400 · App. 08/487,434
Apparatus and method for handling semiconductor wafers
Inventor:
Gregory George
Patented Case
View Patent ↗
Granted: Apr 22, 1997
Filed: Jun 7, 1995
Inventor
Gregory George
Assignee (at issue)
Karl Suss America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.