Granted Patent
Utility
US 5,624,789 · App. 08/460,392
Metal ion reduction in top anti-reflective coatings for photoresisis
Inventors:
M. Dalil Rahman, Dana L. Durham
Patented Case
View Patent ↗
Granted: Apr 29, 1997
Filed: Jun 2, 1995
Inventors
M. Dalil Rahman
Dana L. Durham
Assignee (at issue)
Hoechst Celanese Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.