Granted Patent
Utility
US 5,626,775 · App. 08/645,439
Plasma etch with trifluoroacetic acid and derivatives
Inventors:
David A. Roberts, Raymond Nicholas Vrtis, Arthur Kenneth Hochberg, Robert G. Bryant, John Giles Langan
Patented Case
View Patent ↗
Granted: May 6, 1997
Filed: May 13, 1996
Inventors
David A. Roberts
Raymond Nicholas Vrtis
Arthur Kenneth Hochberg
Robert G. Bryant
John Giles Langan
Assignee (at issue)
Air Products and Chemicals, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.