Granted Patent
Utility
US 5,627,011 · App. 08/440,388
High resolution i-line photoresist of high sensitivity
Inventors:
Norbert Munzel, Reinhard Schulz, Heinz Holzwarth, Stephan Ilg
Patented Case
View Patent ↗
Granted: May 6, 1997
Filed: May 12, 1995
Inventors
Norbert Munzel
Reinhard Schulz
Heinz Holzwarth
Stephan Ilg
Assignee (at issue)
Ciba-Geigy
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.