Granted Patent
Utility
US 5,627,102 · App. 08/569,319
Method for making metal interconnection with chlorine plasma etch
Inventors:
Hiroshi Shinriki, Takeshi Kaizuka, Nobuyuki Takeyasu, Tomohiro Ohta, Eiichi Kondoh, Hiroshi Yamamoto, Tomoharu Katagiri, Tadashi Nakano, Yumiko Kawano
Patented Case
View Patent ↗
Granted: May 6, 1997
Filed: Dec 8, 1995
Inventors
Hiroshi Shinriki
Takeshi Kaizuka
Nobuyuki Takeyasu
Tomohiro Ohta
Eiichi Kondoh
Hiroshi Yamamoto
Tomoharu Katagiri
Tadashi Nakano
Yumiko Kawano
Assignee (at issue)
Kawasaki Steel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.