Granted Patent
Utility
US 5,631,721 · App. 08/449,301
Hybrid illumination system for use in photolithography
Inventors:
Stuart Stanton, Gregg M. Gallatin, Mark Oskotsky, Frits Zernike
Patented Case
View Patent ↗
Granted: May 20, 1997
Filed: May 24, 1995
Inventors
Stuart Stanton
Gregg M. Gallatin
Mark Oskotsky
Frits Zernike
Assignee (at issue)
SVG Lithography Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.