IP Library › Granted Patent US 5,632,908
Granted Patent Utility
US 5,632,908 · App. 08/382,106

Method for making aligned features

Inventor: Muhammed A. Shahid
Patented Case View Patent ↗
Granted: May 27, 1997 Filed: Feb 1, 1995
Inventor
Muhammed A. Shahid
Assignee (at issue)
LUCENT TECHNOLOGIES INC.

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Quick Facts
Patent No.
US 5,632,908
App. No.
08/382,106
Filed
1995-02-01
Granted
1997-05-27
Kind
A