Granted Patent
Utility
US 5,638,175 · App. 08/492,857
Differential phase contrast inspection system with multiple detectors
Inventors:
Andrei Brunfeld, Gregory Toker, Zvi Yaniv, Ilan Laver
Patented Case
View Patent ↗
Granted: Jun 10, 1997
Filed: Sep 19, 1995
Inventors
Andrei Brunfeld
Gregory Toker
Zvi Yaniv
Ilan Laver
Assignee (at issue)
Display Inspection Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.