Granted Patent
Utility
US 5,639,520 · App. 08/592,600
Application of optical processing for growth of silicon dioxide
Inventor:
Bhushan L. Sopori
Patented Case
View Patent ↗
Granted: Jun 17, 1997
Filed: Jan 26, 1996
Inventor
Bhushan L. Sopori
Assignee (at issue)
Midwest Research Institute, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.