IP Library › Granted Patent US 5,643,061
Granted Patent Utility
US 5,643,061 · App. 08/504,686

Pneumatic polishing head for CMP apparatus

Inventors: Paul David Jackson, Stephen C. Schultz
Patented Case View Patent ↗
Granted: Jul 1, 1997 Filed: Jul 20, 1995
Inventors
Paul David Jackson
Stephen C. Schultz
Assignee (at issue)
Integrated Process Equipment Corporation

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Quick Facts
Patent No.
US 5,643,061
App. No.
08/504,686
Filed
1995-07-20
Granted
1997-07-01
Kind
A