Granted Patent
Utility
US 5,643,654 · App. 07/801,500
Pellicle structure and process for preparation thereof with dissolution of coating layer
Inventors:
Minoru Fujita, Hiroaki Nakagawa, Tsutomu Saito
Patented Case
View Patent ↗
Granted: Jul 1, 1997
Filed: Nov 27, 1991
Inventors
Minoru Fujita
Hiroaki Nakagawa
Tsutomu Saito
Assignee (at issue)
Mitsui Petrochemical Industries, Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.