Granted Patent
Utility
US 5,650,614 · App. 08/564,747
Optical scanning system utilizing an atomic force microscope and an optical microscope
Inventors:
Masatoshi Yasutake, Naohiko Fujino
Patented Case
View Patent ↗
Granted: Jul 22, 1997
Filed: Nov 29, 1995
Inventors
Masatoshi Yasutake
Naohiko Fujino
Assignee (at issue)
MITSUBISHI ELECTRIC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.