Granted Patent
Utility
US 5,652,180 · App. 08/264,928
Method of manufacturing semiconductor device with contact structure
Inventors:
Hiroshi Shinriki, Hiroshi Yamamoto, Nobuyuki Takeyasu, Takayuki Komiya, Tomohiro Ohta
Patented Case
View Patent ↗
Granted: Jul 29, 1997
Filed: Jun 24, 1994
Inventors
Hiroshi Shinriki
Hiroshi Yamamoto
Nobuyuki Takeyasu
Takayuki Komiya
Tomohiro Ohta
Assignee (at issue)
Kawasaki Steel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.