IP Library Granted Patent US 5,661,407
Granted Patent Utility
US 5,661,407 · App. 08/531,752

Integrated circuit probe testing device and method

Inventor: Yukio Shibata
Patented Case View Patent ↗
Granted: Aug 26, 1997 Filed: Sep 21, 1995
Inventor
Yukio Shibata
Assignee (at issue)
Kawasaki Steel Corporation

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Quick Facts
Patent No.
US 5,661,407
App. No.
08/531,752
Filed
1995-09-21
Granted
1997-08-26
Kind
A