Granted Patent
Utility
US 5,662,742 · App. 08/723,985
Equipment for manufacturing a semiconductor device using a solid source
Inventor:
Hiroshi Kohno
Patented Case
View Patent ↗
Granted: Sep 2, 1997
Filed: Sep 27, 1996
Inventor
Hiroshi Kohno
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.