Granted Patent
Utility
US 5,670,785 · App. 08/756,560
Charge converter provided in an ion implantation apparatus
Inventor:
Yoshihiro Kitamura
Patented Case
View Patent ↗
Granted: Sep 23, 1997
Filed: Nov 26, 1996
Inventor
Yoshihiro Kitamura
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.