Granted Patent
Utility
US 5,672,551 · App. 08/462,176
Method for manufacturing a semiconductor pressure sensor with single-crystal silicon diaphragm and single-crystal gage elements
Inventor:
Clifford D. Fung
Patented Case
View Patent ↗
Granted: Sep 30, 1997
Filed: Jun 5, 1995
Inventor
Clifford D. Fung
Assignee (at issue)
Fox Boro Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.