Granted Patent
Utility
US 5,674,756 · App. 08/502,053
Method for intrinsic-gettering silicon wafer
Inventors:
Yuhki Satoh, Hisashi Furuya
Patented Case
View Patent ↗
Granted: Oct 7, 1997
Filed: Jul 14, 1995
Inventors
Yuhki Satoh
Hisashi Furuya
Assignees (at issue)
MITSUBISHI MATERIALS CORPORATION
Mitsubishi Materials Silicon Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.