Granted Patent
Utility
US 5,676,751 · App. 08/589,491
Rapid cooling of CZ silicon crystal growth system
Inventors:
Mohsen Banan, Harold W. Korb, Kyong-Min Kim
Patented Case
View Patent ↗
Granted: Oct 14, 1997
Filed: Jan 22, 1996
Inventors
Mohsen Banan
Harold W. Korb
Kyong-Min Kim
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.