Granted Patent
Utility
US 5,681,418 · App. 08/521,440
Plasma processing with inductive coupling
Inventor:
Yasushi Ishimaru
Patented Case
View Patent ↗
Granted: Oct 28, 1997
Filed: Aug 30, 1995
Inventor
Yasushi Ishimaru
Assignee (at issue)
Fujitsu Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.