Granted Patent
Utility
US 5,684,566 · App. 08/449,005
Illumination system and method employing a deformable mirror and diffractive optical elements
Inventor:
Stuart Stanton
Patented Case
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Granted: Nov 4, 1997
Filed: May 24, 1995
Inventor
Stuart Stanton
Assignee (at issue)
SVG Lithography Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.