IP Library Granted Patent US 5,686,793
Granted Patent Utility
US 5,686,793 · App. 08/621,364

Excimer lamp with high pressure fill

Inventors: Brian Turner, James T. Dolan
Patented Case View Patent ↗
Granted: Nov 11, 1997 Filed: Mar 25, 1996
Inventors
Brian Turner
James T. Dolan
Assignee (at issue)
Fusion UV Systems

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Quick Facts
Patent No.
US 5,686,793
App. No.
08/621,364
Filed
1996-03-25
Granted
1997-11-11
Kind
A