IP Library Granted Patent US 5,688,389
Granted Patent Utility
US 5,688,389 · App. 08/485,214

Method and apparatus for thin film coating an article

Inventors: Erik J. Bjornard, Eric W. Kurman, Debra M. Steffenhagen, Clifford L. Taylor
Patented Case View Patent ↗
Granted: Nov 18, 1997 Filed: Jun 7, 1995
Inventors
Erik J. Bjornard
Eric W. Kurman
Debra M. Steffenhagen
Clifford L. Taylor
Assignee (at issue)
Viratec Thin Films, Inc.

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Quick Facts
Patent No.
US 5,688,389
App. No.
08/485,214
Filed
1995-06-07
Granted
1997-11-18
Kind
A