Granted Patent
Utility
US 5,695,392 · App. 08/635,020
Polishing device with improved handling of fluid polishing media
Inventor:
Inki Kim
Patented Case
View Patent ↗
Granted: Dec 9, 1997
Filed: Apr 19, 1996
Inventor
Inki Kim
Assignee (at issue)
SPEEDFAM CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.